Research Catalog

Tonkie neorganicheskie plenki v mikroėlektronike.

Title
Tonkie neorganicheskie plenki v mikroėlektronike.
Publication
Leningrad, "Nauka," Leningr. otd-nie, 1972.

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StatusFormatAccessCall NumberItem Location
Book/TextRequest in advance *QH 75-536Offsite

Details

Additional Authors
  • Borisenko, A. I. (Anatoliĭ Isidorovich)
  • Institut khimii silikatov (Akademi︠i︡a nauk SSSR)
Description
114 p. with diagrs.; 20 cm.
Subject
  • Thin films
  • Integrated circuits
  • Semiconductors
Note
  • At head of title: Akademi︠i︡a nauk SSSR. Institut khimii silikatov im. I. B. Grebenshchikova.
  • By A. I. Borisenko and others.
Bibliography (note)
  • Bibliography: p. 107-[113]
Call Number
*QH 75-536
LCCN
73326143
OCLC
NYPG754260087-B
Title
Tonkie neorganicheskie plenki v mikroėlektronike.
Imprint
Leningrad, "Nauka," Leningr. otd-nie, 1972.
Bibliography
Bibliography: p. 107-[113]
Added Author
Borisenko, A. I. (Anatoliĭ Isidorovich)
Institut khimii silikatov (Akademi︠i︡a nauk SSSR)
Research Call Number
*QH 75-536
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