Research Catalog

Ion implantation, sputtering and their applications

Title: Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley.
Author: Townsend, P. D. (Peter David)
Publication: London ; New York : Academic Press, 1976.

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Additional Authors

Description

ix, 333 p. : ill.; 24 cm.

Subjects

Bibliography (note)

Call Number

JSE 77-131

ISBN

0126969507

LCCN

75196983

OCLC

Author

Townsend, P. D. (Peter David)

Title

Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley.

Imprint

London ; New York : Academic Press, 1976.

Bibliography

Includes bibliographies and index.

Added Author

Kelly, J. C. (John Clive)

Hartley, N. E. W.

Research Call Number

JSE 77-131