Research Catalog
Glow discharge processes : sputtering and plasma etching / Brian Chapman.
- Title
- Glow discharge processes : sputtering and plasma etching / Brian Chapman.
- Author
- Chapman, Brian N.
- Publication
- New York : Wiley, 1980.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 81-272 | Offsite |
Details
- Description
- xv, 406 p. : ill.; 24 cm.
- Alternative Title
- Plasma etching.
- Subject
- Note
- "A Wiley-Interscience publication."
- Includes index.
- Bibliography (note)
- Bibliography: p. 397-400.
- Call Number
- JSE 81-272
- ISBN
- 047107828X
- LCCN
- 80017047
- OCLC
- 6379539
- NYPG814107199-B
- Author
- Chapman, Brian N.
- Title
- Glow discharge processes : sputtering and plasma etching / Brian Chapman.
- Imprint
- New York : Wiley, 1980.
- Bibliography
- Bibliography: p. 397-400.
- Added Title
- Plasma etching.
- Research Call Number
- JSE 81-272