Research Catalog

Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982

Title
Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.
Publication
Berlin ; New York : Springer-Verlag, 1983.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
TextRequest in advance JSE 84-200Offsite

Details

Additional Authors
  • Ryssel, Heiner, 1941-
  • Glawischnig, H. (Hans), 1939-
  • International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)
Description
x, 556 p. : ill.; 24 cm.
Series Statement
Springer series in electrophysics ; v. 11
Subjects
Bibliography (note)
  • Includes bibliographies and index.
Call Number
JSE 84-200
ISBN
0387124918 (U.S.)
LCCN
83006689
OCLC
  • 9488619
  • NYPG84-B13048
Title
Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.
Imprint
Berlin ; New York : Springer-Verlag, 1983.
Series
Springer series in electrophysics ; v. 11
Bibliography
Includes bibliographies and index.
Added Author
Ryssel, Heiner, 1941-
Glawischnig, H. (Hans), 1939-
International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)
Research Call Number
JSE 84-200
View in Legacy Catalog