Research Catalog
Transmission electron microscopy of silicon VLSI circuits and structures
- Title
- Transmission electron microscopy of silicon VLSI circuits and structures / R.B. Marcus and T.T. Sheng.
- Author
- Marcus, R. B. (Robert B.)
- Publication
- New York : Wiley, c1983.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 85-709 | Offsite |
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Details
- Additional Authors
- Sheng, T. T. (Tai Tsu)
- Description
- x, 217 p. : ill.; 29 cm.
- Subjects
- Note
- "A Wiley-Interscience publication."
- Includes index.
- Bibliography (note)
- Bibliography: p. 211-213.
- Call Number
- JSF 85-709
- ISBN
- 0471092517 :
- LCCN
- 83003469
- OCLC
- 9324161
- 9324161
- Author
- Marcus, R. B. (Robert B.)
- Title
- Transmission electron microscopy of silicon VLSI circuits and structures / R.B. Marcus and T.T. Sheng.
- Imprint
- New York : Wiley, c1983.
- Bibliography
- Bibliography: p. 211-213.
- Added Author
- Sheng, T. T. (Tai Tsu)
- Research Call Number
- JSF 85-709