Research Catalog
Vacuum technology, thin films, and sputtering : an introduction
- Title
- Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.
- Author
- Stuart, R. V.
- Publication
- New York : Academic Press, 1983.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Book/Text | Request in advance | JSE 84-62 | Offsite |
Details
- Description
- viii, 151 p. : ill.; 24 cm.
- Subject
- Note
- Includes index.
- Call Number
- JSE 84-62
- ISBN
- 0126747806
- LCCN
- 82013748
- OCLC
- 8667288
- NYPG84-B4278
- Author
- Stuart, R. V.
- Title
- Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.
- Imprint
- New York : Academic Press, 1983.
- Research Call Number
- JSE 84-62