Research Catalog
Journal of vacuum science & technology.
- Title
- Journal of vacuum science & technology. B, Microelectronics processing and phenomena.
- Publication
- New York : Published for the American Vacuum Society by the American Institute of Physics, 1983-
Items in the Library & Off-site
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72 Items
| Status | Vol/Date | Format | Access | Call Number | Item Location |
|---|---|---|---|---|---|
| v. 25, no. 1 (Jan-Feb 2007) | Text | Request in advance | JSP 85-125 v. 25, no. 1 (Jan-Feb 2007) | Offsite | |
| v. 25, no. 3 (May-Jun 2007) | Text | Request in advance | JSP 85-125 v. 25, no. 3 (May-Jun 2007) | Offsite | |
| v. 25, no. 4 (Jul-Aug 2007) | Text | Request in advance | JSP 85-125 v. 25, no. 4 (Jul-Aug 2007) | Offsite | |
| v. 25, no. 5 (Sep-Oct 2007) | Text | Request in advance | JSP 85-125 v. 25, no. 5 (Sep-Oct 2007) | Offsite | |
| v. 25, no. 6 (Nov-Dec 2007 | Text | Request in advance | JSP 85-125 v. 25, no. 6 (Nov-Dec 2007 | Offsite | |
| v. 25, no. 2 (Mar-Apr 2007) | Text | Request in advance | JSP 87-120 v. 25, no. 2 (Mar-Apr 2007) | Offsite | |
| v. 24, no. 1-2 (Jan.-Ap. 2006) | Text | Request in advance | JSP 85-125 v. 24, no. 1-2 (Jan.-Ap. 2006) | Offsite | |
| v. 24, no. 3-4 (May-Aug. 2006) | Text | Request in advance | JSP 85-125 v. 24, no. 3-4 (May-Aug. 2006) | Offsite | |
| v. 24, no. 5 (Sep-Oct 2006) | Text | Request in advance | JSP 85-125 v. 24, no. 5 (Sep-Oct 2006) | Offsite | |
| v. 24, no. 6 (Nov-Dec 2006) | Text | Request in advance | JSP 85-125 v. 24, no. 6 (Nov-Dec 2006) | Offsite | |
| v. 23, no. 1-3 (Jan.-June 2005) | Text | Request in advance | JSP 85-125 v. 23, no. 1-3 (Jan.-June 2005) | Offsite | |
| v. 23, no. 4-5 (July-Oct. 2005) | Text | Request in advance | JSP 85-125 v. 23, no. 4-5 (July-Oct. 2005) | Offsite | |
| v. 23, no. 6 (Nov.-Dec. 2005) | Text | Request in advance | JSP 85-125 v. 23, no. 6 (Nov.-Dec. 2005) | Offsite | |
| v. 22, no. 1-3 (Jan.-June 2004) | Text | Request in advance | JSP 85-125 v. 22, no. 1-3 (Jan.-June 2004) | Offsite | |
| v. 22, no. 4-5 (July-Oct. 2004) | Text | Request in advance | JSP 85-125 v. 22, no. 4-5 (July-Oct. 2004) | Offsite | |
| v. 22, no. 6 (Nov.-Dec. 2004) | Text | Request in advance | JSP 85-125 v. 22, no. 6 (Nov.-Dec. 2004) | Offsite | |
| v. 21, no. 1-3 (Jan.-June 2003) | Text | Request in advance | JSP 85-125 v. 21, no. 1-3 (Jan.-June 2003) | Offsite | |
| v. 21, no. 4-5 (July-Oct. 2003) | Text | Request in advance | JSP 85-125 v. 21, no. 4-5 (July-Oct. 2003) | Offsite | |
| v. 21, no. 6 (Nov.-Dec. 2003) | Text | Request in advance | JSP 85-125 v. 21, no. 6 (Nov.-Dec. 2003) | Offsite | |
| v. 20 (Jan.-Apr. 2002) | Text | Request in advance | JSP 85-125 v. 20 (Jan.-Apr. 2002) | Offsite |
Holdings
- Location
- Schwarzman Building - Main Reading Room 315
- Format
- Call Number
- JSP 85-125
- Library Has
- 13:3(1995)-14:6(1995),15:4(1996)-25:1(2007),25:3(2007)-25:6(2007).
Details
- Additional Authors
- Publication Date
- 2nd ser., vol. 1, no. 1 (Jan.-Mar. 1983)-
- Description
- v. : ill.; 29 cm.
- Alternative Title
- Journal of vacuum science & technology. B. Microelectronics processing and phenomena
- Journal of vacuum science and technology. B, Microelectronics processing and phenomena
- Microelectronics processing and phenomena
- Subjects
- Note
- Title from cover.
- Issued By (note)
- Official journal of the American Vacuum Society.
- Call Number
- JSP 85-125
- ISSN
- 0734-211X
- LCCN
- sn 82003446
- OCLC
- 8697479
- NYPG85-S2787
- Title
- Journal of vacuum science & technology. B, Microelectronics processing and phenomena.
- Imprint
- New York : Published for the American Vacuum Society by the American Institute of Physics, 1983-
- Current Frequency
- Quarterly
- Issued By
- Official journal of the American Vacuum Society.
- Added Author
- American Vacuum Society.American Institute of Physics.
- Continues In Part
- Journal of vacuum science and technology
- Research Call Number
- JSP 85-125