Research Catalog

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Title: Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, Richard B. Fair, Charles W. Pearce, Jack Washburn.
Publication: Pittsburgh, Pa. : Materials Research Society, c1985.

Items in the Library & Off-site

Filter by

1 Item

Item details
Status	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	Text	Request in advance	JSE 86-550	Offsite

Details

Additional Authors

Description

xiii, 284 p. : ill.; 24 cm.

Series Statement

Materials Research Society symposia proceedings, 0272-9172 ; v. 36

Subjects

Note

"Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Materials Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments.

Bibliography (note)

Includes bibliographies and indexes.

Call Number

JSE 86-550

ISBN

0931837014

LCCN

85007226

OCLC

11971128
NYPG86-B20033

Title

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, Richard B. Fair, Charles W. Pearce, Jack Washburn.

Imprint

Pittsburgh, Pa. : Materials Research Society, c1985.

Series

Materials Research Society symposia proceedings, 0272-9172 ; v. 36

Bibliography

Includes bibliographies and indexes.

Added Author

Fair, Richard B.

Pearce, Charles W.

Washburn, Jack, 1921-

Materials Research Society. Meeting (1984 : Boston, Mass.)

Symposium on Impurity Diffusion and Gettering in Semiconductors (1984 : Boston, Mass.)

Research Call Number

JSE 86-550

View in Legacy Catalog