Research Catalog
Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
- Title
- Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles.
- Publication
- Pittsburgh, Pa. : Materials Research Society, c1985.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 86-552 | Offsite |
Details
- Additional Authors
- Description
- xv, 522 p. : ill.; 24 cm.
- Series Statement
- Materials Research Society symposia proceedings ; v. 38
- Subjects
- Note
- Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.
- Bibliography (note)
- Includes bibliographies and indexes.
- Call Number
- JSE 86-552
- ISBN
- 0931837030
- LCCN
- 85003085
- OCLC
- 11784552
- NYPG86-B20040
- Title
- Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles.
- Imprint
- Pittsburgh, Pa. : Materials Research Society, c1985.
- Series
- Materials Research Society symposia proceedings ; v. 38
- Bibliography
- Includes bibliographies and indexes.
- Added Author
- Chang, R. P. H. (Robert Pang Heng), 1941-Abeles, Benjamin, 1925-Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)
- Research Call Number
- JSE 86-552