Research Catalog

Laser chemical processing of semiconductor devices : extended abstracts: proceedings of Symposium B, 1984 Fall Meeting of the Materials Research Society, November 27-29, 1984, Boston Marriott Hotel at Copley Place, Boston, Massachusetts

Title: Laser chemical processing of semiconductor devices : extended abstracts: proceedings of Symposium B, 1984 Fall Meeting of the Materials Research Society, November 27-29, 1984, Boston Marriott Hotel at Copley Place, Boston, Massachusetts / edited by F.A. Houle, T.F. Deutsch, R.M. Osgood, Jr. ; pricipal symposium support, Air Force Office of Scientific Research , Army Research Office, Office of Naval Research ; supplement support, IBM Corporation, Lambda Physik, LASERTECHNICS.
Author: Materials Research Society. Fall Meeting (1984 : Boston, Mass.),),),),) Symposium B.
Publication: Pittsburgh, Pa. : Materials Research Society, c1984.

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Details

Additional Authors

Description

viii, 136 p. : ill.; 23 cm.

Series Statement

Materials Research Society extended abstracts ; EA-1

Subjects

Semiconductor industry > Laser use in > Congresses
Semiconductors > Testing > Optical methods > Congresses

Bibliography (note)

Includes bibliographies and index.

Call Number

JSD 88-924

OCLC

NYPG86-B21459

Author

Materials Research Society. Fall Meeting (1984 : Boston, Mass.),),),),) Symposium B.

Title

Laser chemical processing of semiconductor devices : extended abstracts: proceedings of Symposium B, 1984 Fall Meeting of the Materials Research Society, November 27-29, 1984, Boston Marriott Hotel at Copley Place, Boston, Massachusetts / edited by F.A. Houle, T.F. Deutsch, R.M. Osgood, Jr. ; pricipal symposium support, Air Force Office of Scientific Research , Army Research Office, Office of Naval Research ; supplement support, IBM Corporation, Lambda Physik, LASERTECHNICS.

Imprint

Pittsburgh, Pa. : Materials Research Society, c1984.

Series

Materials Research Society extended abstracts ; EA-1

Bibliography

Includes bibliographies and index.

Added Author

Houle, F. A.

Deutsch, T. F.

Osgood, R. M.

United States. Air Force. Office of Scientific Research.

United States. Army Research Office.

United States. Office of Naval Research.

International Business Machines Corporation.

Lambda Physik (Organization)

LASERTECHNICS (Firm)

Research Call Number

JSD 88-924

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