Research Catalog
Applications of plasma processes to VLSI technology
- Title
- Applications of plasma processes to VLSI technology / edited by Takuo Sugano ; translated by Hyo-gun Kim.
- Publication
- New York : John Wiley & Sons, c1985.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 86-2282 | Offsite |
Details
- Additional Authors
- Sugano, Takuo, 1931-
- Description
- xiv, 394 p. : ill.; 24 cm.
- Subjects
- Note
- "A Wiley-Interscience publication."
- Bibliography (note)
- Includes bibliographical references and index.
- Call Number
- JSE 86-2282
- ISBN
- 0471869600
- LCCN
- 85003255
- OCLC
- 11754602
- NYPG86-B9560
- Title
- Applications of plasma processes to VLSI technology / edited by Takuo Sugano ; translated by Hyo-gun Kim.
- Imprint
- New York : John Wiley & Sons, c1985.
- Bibliography
- Includes bibliographical references and index.
- Added Author
- Sugano, Takuo, 1931-
- Research Call Number
- JSE 86-2282