Research Catalog

Silicon-on-insulator : its technology and applications

Title
Silicon-on-insulator : its technology and applications / edited by S. Furukawa.
Publication
Tokyo : KTK Scientific Publishers ; Boston : D. Reidel ; Hingham, MA : Sold and distributed in the U.S.A. and Canada by Kluwer Academic Publishers, 1985.

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Details

Additional Authors
  • Furukawa, S. (Seijirō), 1934-
  • National Science Foundation (U.S.)
  • Nihon Gakujutsu Shinkōkai.
  • US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics" (1983 : Ōiso-machi, Japan)
Description
viii, 295 p. : ill.; 24 cm.
Uniform Title
Layered structures and interface kinetics.
Subjects
Note
  • "Papers presented during the US-Japan Seminar on 'Solid Phase Epitaxy and Interface Kinetics' held in Oiso, Japan, June 20-24, 1983 ... co-sponsored by National Science Foundation and Japan Society for the Promotion of Science"--P. 5.
  • Companion volume containing the other papers presented at seminar published under title: Layered structures and interface kinetics.
  • "ASST, advances in solid state technology"--Cover.
Bibliography (note)
  • Includes bibliographies and index.
Call Number
JSE 87-606
ISBN
9027719403
LCCN
84027751
OCLC
  • 11548649
  • NYPG87-B13079
Title
Silicon-on-insulator : its technology and applications / edited by S. Furukawa.
Imprint
Tokyo : KTK Scientific Publishers ; Boston : D. Reidel ; Hingham, MA : Sold and distributed in the U.S.A. and Canada by Kluwer Academic Publishers, 1985.
Bibliography
Includes bibliographies and index.
Added Author
Furukawa, S. (Seijirō), 1934-
National Science Foundation (U.S.)
Nihon Gakujutsu Shinkōkai.
US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics" (1983 : Ōiso-machi, Japan)
Added Title
Layered structures and interface kinetics.
Research Call Number
JSE 87-606
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