Research Catalog

Beam-induced chemical processes : proceedings of Symposium D, 1985 Fall Meeting of the Materials Research Society, December 2-6, 1985, Boston Marriott Hotel at Copley Place, Boston, Massachusetts : extended abstracts

Title
Beam-induced chemical processes : proceedings of Symposium D, 1985 Fall Meeting of the Materials Research Society, December 2-6, 1985, Boston Marriott Hotel at Copley Place, Boston, Massachusetts : extended abstracts / edited by R.J. von Gutfield, J.E. Greene, H. Schlossberg ; principal symposium support, Air Force Office of Scientific Research ; supplemental support, IBM Corporation.
Publication
Pittsburgh : Materials Research Society, c1985.

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Details

Additional Authors
  • Von Gutfeld, R. J.
  • Greene, J. E. (Joseph E.)
  • Schlossberg, H.
  • Materials Research Society. Meeting (1985 : Boston, Mass.)
  • United States. Air Force. Office of Scientific Research.
  • International Business Machines Corporation.
Description
ix, 184 p. : ill.; 23 cm.
Series Statement
Materials Research Society extended abstracts ; EA-5
Subject
  • Semiconductor films > Congresses
  • Semiconductors > Etching > Congresses
  • Vapor-plating > Congresses
  • Semiconductor industry > Laser use in > Congresses
  • Laser beams > Industrial applications > Congresses
Bibliography (note)
  • Includes bibliographies and index.
Call Number
JSE 88-2478
OCLC
NYPG87-B13802
Title
Beam-induced chemical processes : proceedings of Symposium D, 1985 Fall Meeting of the Materials Research Society, December 2-6, 1985, Boston Marriott Hotel at Copley Place, Boston, Massachusetts : extended abstracts / edited by R.J. von Gutfield, J.E. Greene, H. Schlossberg ; principal symposium support, Air Force Office of Scientific Research ; supplemental support, IBM Corporation.
Imprint
Pittsburgh : Materials Research Society, c1985.
Series
Materials Research Society extended abstracts ; EA-5
Bibliography
Includes bibliographies and index.
Added Author
Von Gutfeld, R. J.
Greene, J. E. (Joseph E.)
Schlossberg, H.
Materials Research Society. Meeting (1985 : Boston, Mass.)
United States. Air Force. Office of Scientific Research.
International Business Machines Corporation.
Research Call Number
JSE 88-2478
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