Research Catalog

Semiconductor silicon 1986 : proceedings of the Fifth International Symposium on Silicon Materials Science and Technology

Title: Semiconductor silicon 1986 : proceedings of the Fifth International Symposium on Silicon Materials Science and Technology / edited by Howard R. Huff, Takao Abe, Bernd Kolbesen ; Electronics and Dielectrics and Insulation Divisions [sponsors].
Author: International Symposium on Silicon Materials Science and Technology (5th : 1986 : Boston, Mass.)
Publication: Pennington, NJ : Electrochemical Society, c1986.

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Details

Additional Authors

Description

xiv, 1096 p. : ill.; 23 cm.

Series Statement

Proceedings / Electrochemical Society ; v. 86-4

Uniform Title

Proceedings (Electrochemical Society) ; v. 86-4.

Subjects

Note

Held 5-9 May, 1986 in Boston.

Bibliography (note)

Includes bibliographical references and indexes.

Call Number

JSE 87-737

LCCN

86080802

OCLC

14221139
14221139

Conference

International Symposium on Silicon Materials Science and Technology (5th : 1986 : Boston, Mass.)

Title

Semiconductor silicon 1986 : proceedings of the Fifth International Symposium on Silicon Materials Science and Technology / edited by Howard R. Huff, Takao Abe, Bernd Kolbesen ; Electronics and Dielectrics and Insulation Divisions [sponsors].

Imprint

Pennington, NJ : Electrochemical Society, c1986.

Series

Proceedings / Electrochemical Society ; v. 86-4

Proceedings (Electrochemical Society) ; v. 86-4.

Bibliography

Includes bibliographical references and indexes.

Added Author

Huff, Howard R.

Electrochemical Society. Electronics Division.

Electrochemical Society. Dielectrics and Insulation Division.

Research Call Number

JSE 87-737

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