Research Catalog
SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment
- Title
- SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment / presented by Semiconductor Equipment and Materials Institute, Inc.
- Author
- SEMICON/West (1986 : San Mateo, Calif.)
- Publication
- Mountain View, Calif. : The Institute, [1986?]
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 88-563 | Offsite |
Details
- Additional Authors
- Semiconductor Equipment and Materials Institute.
- Description
- x, 234 p. : ill.; 28 cm.
- Alternative Title
- Technical proceedings, SEMICON/West.
- Process and equipment reliability in the fab environment.
- Subjects
- Note
- Cover title: Technical proceedings, SEMICON/West 1986 ... .
- Bibliography (note)
- Includes bibliographical references.
- Call Number
- JSF 88-563
- OCLC
- NYPG87-B20448
- Conference
- SEMICON/West (1986 : San Mateo, Calif.)
- Title
- SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment / presented by Semiconductor Equipment and Materials Institute, Inc.
- Imprint
- Mountain View, Calif. : The Institute, [1986?]
- Bibliography
- Includes bibliographical references.
- Added Author
- Semiconductor Equipment and Materials Institute.
- Added Title
- Technical proceedings, SEMICON/West.Process and equipment reliability in the fab environment.
- Research Call Number
- JSF 88-563