Research Catalog
Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
- Title
- Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, J.W. Coburn, R.A. Gottscho, D.W. Hess.
- Publication
- Pittsburgh, Pa. : Materials Research Society, c1986.
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|---|---|---|---|---|
Not available - Please for assistance. | Text | Request in advance | JSE 87-1642 | Offsite |
Holdings
Details
- Additional Authors
- Description
- xvii, 463 p. : ill.; 24 cm.
- Series Statement
- Materials Research Society symposia proceedings, 0272-9172 ; v. 68
- Subject
- Plasma engineering > Congresses
- Bibliography (note)
- Includes bibliographies and indexes.
- Call Number
- JSE 87-1642
- ISBN
- 0931837340 :
- LCCN
- 86016292
- OCLC
- 13795753
- 13795753
- Title
- Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, J.W. Coburn, R.A. Gottscho, D.W. Hess.
- Imprint
- Pittsburgh, Pa. : Materials Research Society, c1986.
- Series
- Materials Research Society symposia proceedings, 0272-9172 ; v. 68
- Bibliography
- Includes bibliographies and indexes.
- Added Author
- Coburn, J. W., 1932-Gottscho, R. A.Hess, Dennis W.Materials Research Society.
- Research Call Number
- JSE 87-1642