Research Catalog

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Title: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vikram J. Kapoor, Kevin T. Hankins ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
Author: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (2nd : 1986 : San Diego, Calif.)
Publication: Pennington, NJ (10 S. Main St., Pennington 08534-2696) : Electrochemical Society, c1987.

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Details

Additional Authors

Description

x, 550 p. : ill.; 23cm.

Series Statement

Proceedings / Electrochemical Society ; v. 87-10

Uniform Title

Proceedings (Electrochemical Society) ; v. 87-10.

Subjects

Note

Papers presented at the 2nd symposium held October 20-24, 1986 in San Diego, Calif.

Bibliography (note)

Includes bibliographies and indexes.

Call Number

JSE 88-2539

LCCN

87082368

OCLC

16953068
16953068

Conference

Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (2nd : 1986 : San Diego, Calif.)

Title

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vikram J. Kapoor, Kevin T. Hankins ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.

Imprint

Pennington, NJ (10 S. Main St., Pennington 08534-2696) : Electrochemical Society, c1987.

Series

Proceedings / Electrochemical Society ; v. 87-10

Proceedings (Electrochemical Society) ; v. 87-10.

Bibliography

Includes bibliographies and indexes.

Added Author

Kapoor, Vikram J.

Hankins, Kevin T.

Electrochemical Society. Dielectrics and Insulation Division.

Electrochemical Society. Electronics Division.

Research Call Number

JSE 88-2539

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