Research Catalog
Semiconductor lithography : principles, practices, and materials
- Title
- Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau.
- Author
- Moreau, Wayne M.
- Publication
- New York : Plenum Press, c1988.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 88-1620 | Offsite |
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Details
- Description
- xx, 931 p. : ill.; 26 cm.
- Series Statement
- Microdevices
- Subject
- Bibliography (note)
- Includes bibliographies and index.
- Call Number
- JSF 88-1620
- ISBN
- 0306421852
- LCCN
- 87029077
- OCLC
- 16871199
- 16871199
- Author
- Moreau, Wayne M.
- Title
- Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau.
- Imprint
- New York : Plenum Press, c1988.
- Series
- Microdevices
- Bibliography
- Includes bibliographies and index.
- Research Call Number
- JSF 88-1620