Research Catalog
Introduction to microlithography : theory, materials, and processing
- Title
- Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor ; C.G. Willson, editor ; M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
- Publication
- Washington, D.C. : The Society, 1983.
Items in the Library & Off-site
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| Status | Vol/Date | Format | Access | Call Number | Item Location |
|---|---|---|---|---|---|
| v. 219 | Text | Request in advance | JSK 76-18 v. 219 | Offsite |
Details
- Additional Authors
- Description
- ix, 363 p. : ill.; 24 cm.
- Series Statement
- ACS symposium series, 0097-6156 ; 219
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin.
- Call Number
- JSK 76-18 v. 219
- ISBN
- 0841207755
- LCCN
- 83005968 //r853
- OCLC
- 9371344
- NYPG89-B53577
- Title
- Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor ; C.G. Willson, editor ; M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
- Imprint
- Washington, D.C. : The Society, 1983.
- Series
- ACS symposium series, 0097-6156 ; 219
- Bibliography
- Includes bibliographical references and index.
- Added Author
- Thompson, L. F., 1944-Willson, C. G. (C. Grant), 1939-Bowden, M. J., 1943-American Chemical Society. Division of Organic Coatings and Plastics Chemistry.American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.)
- Research Call Number
- JSK 76-18 v. 219