Research Catalog
Plasma etching : an introduction
- Title
- Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm.
- Publication
- Boston : Academic Press, c1989.
Items in the Library & Off-site
Filter by
1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | JSE 90-235 | Offsite |
Holdings
Details
- Additional Authors
- Description
- xii, 476 p. : ill.; 24 cm.
- Series Statement
- Plasma--materials interactions
- Uniform Title
- Plasma.
- Subject
- Plasma etching
- Bibliography (note)
- Includes bibliographies and index.
- Call Number
- JSE 90-235
- ISBN
- 0124693709
- LCCN
- 87037419
- OCLC
- 17384997
- 17384997
- Title
- Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm.
- Imprint
- Boston : Academic Press, c1989.
- Series
- Plasma--materials interactionsPlasma.
- Bibliography
- Includes bibliographies and index.
- Added Author
- Manos, Dennis M.Flamm, Daniel L.
- Research Call Number
- JSE 90-235