Research Catalog

Plasma etching : an introduction

Title: Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm.
Publication: Boston : Academic Press, c1989.

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Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	Text	Request in advance	JSE 90-235	Offsite

Additional Authors

Description

xii, 476 p. : ill.; 24 cm.

Series Statement

Plasma--materials interactions

Uniform Title

Plasma.

Subject

Plasma etching

Bibliography (note)

Call Number

JSE 90-235

ISBN

0124693709

LCCN

87037419

OCLC

Title

Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm.

Imprint

Boston : Academic Press, c1989.

Series

Plasma--materials interactions

Plasma.

Bibliography

Includes bibliographies and index.

Added Author

Manos, Dennis M.

Flamm, Daniel L.

Research Call Number

JSE 90-235