Research Catalog
Tungsten and other refractory metals for VLSI applications.
- Title
- Tungsten and other refractory metals for VLSI applications.
- Author
- Workshop on Tungsten and Other Refractory Metals for VLSI Applications.
- Publication
- Pittsburgh, Pa : Materials Research Society, 1986-
Items in the Library & Off-site
Filter by
2 Items
| Status | Vol/Date | Format | Access | Call Number | Item Location |
|---|---|---|---|---|---|
| v. 2 (1986) | Text | Request in advance | JSP 89-60 v. 2 (1986) | Offsite | |
| v. 1 (1985) | Text | Request in advance | JSP 89-60 v. 1 (1985) | Offsite |
Holdings
Details
- Additional Authors
- Publication Date
- [1] (1985)-
- Description
- v. : ill.; 24 cm.
- Alternative Title
- Tungsten other refract. metals VLSI appl.
- Tungsten and other refractory metals for VLSI applications
- Subject
- Numbering (note)
- Issue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications.
- Call Number
- JSP 89-60
- ISSN
- 0886-7860
- LCCN
- 87657562
- OCLC
- 12995536
- 12995536
- NYPG89-S1695
- Conference
- Workshop on Tungsten and Other Refractory Metals for VLSI Applications.
- Title
- Tungsten and other refractory metals for VLSI applications.
- Imprint
- Pittsburgh, Pa : Materials Research Society, 1986-
- Current Frequency
- Annual
- Numbering
- Issue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications.
- Added Author
- Materials Research Society.Workshop on Tungsten for VLSI Applications.
- Abbreviated Title
- Tungsten other refract. metals VLSI appl.
- Continued By
- m2as Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications. Tungsten and other advanced metals for VLSI/ULSI applications : proceedings of the ... Workshop
- Research Call Number
- JSP 89-60 Library has: [1] (1985)-2 (1986).