Research Catalog
Materials for microlithography : radiation-sensitive polymers : based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
- Title
- Materials for microlithography : radiation-sensitive polymers : based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984 / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor.
- Publication
- Washington, D.C. : The Society, 1984.
Items in the Library & Off-site
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1 Item
| Status | Vol/Date | Format | Access | Call Number | Item Location |
|---|---|---|---|---|---|
| v. 266 | Text | Request in advance | JSK 76-18 v. 266 | Offsite |
Details
- Additional Authors
- Thompson, L. F., 1944-
- Willson, C. G. (C. Grant), 1939-
- Fréchet, J. M. J.
- American Chemical Society. Division of Polymeric Materials: Science and Engineering.
- American Chemical Society. Division of Polymer Chemistry.
- American Chemical Society. Meeting (187th : 1984 : St. Louis, Mo.)
- American Chemical Society. Meeting (187th : 1984 : Saint Louis, Mo.)
- Description
- viii, 494 p. : ill.; 24 cm.
- Series Statement
- ACS symposium series, 0097-6156 ; 266
- Alternative Title
- Radiation-sensitive polymers.
- Subjects
- Bibliography (note)
- Includes bibliographies and indexes.
- Call Number
- JSK 76-18 v. 266
- ISBN
- 0841208719
- LCCN
- 84021744 //r85
- OCLC
- 11316033
- NYPG90-B20610
- Title
- Materials for microlithography : radiation-sensitive polymers : based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984 / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor.
- Imprint
- Washington, D.C. : The Society, 1984.
- Series
- ACS symposium series, 0097-6156 ; 266
- Bibliography
- Includes bibliographies and indexes.
- Added Author
- Thompson, L. F., 1944-Willson, C. G. (C. Grant), 1939-Fréchet, J. M. J.American Chemical Society. Division of Polymeric Materials: Science and Engineering.American Chemical Society. Division of Polymer Chemistry.American Chemical Society. Meeting (187th : 1984 : St. Louis, Mo.)American Chemical Society. Meeting (187th : 1984 : Saint Louis, Mo.)
- Added Title
- Radiation-sensitive polymers.
- Research Call Number
- JSK 76-18 v. 266