Research Catalog

Plasma-surface interactions and processing of materials

Title
Plasma-surface interactions and processing of materials / edited by Orlando Auciello ... [et al.]
Author
NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials (1988 : Alicante, Spain)
Publication
Dordrecht ; Boston : Kluwer Academic Publishers, c1990.

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Details

Additional Authors
Auciello, Orlando.
Description
xiii, 557 p. : ill.; 25 cm.
Series Statement
NATO ASI series. Series E, Applied sciences ; vol. 176
Uniform Title
NATO ASI series. Series E, Applied sciences ; no. 176.
Subjects
Note
  • "Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988."
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 90-902
ISBN
0792305841 (alk. paper)
LCCN
89048126
OCLC
  • 20693050
  • 20693050
Conference
NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials (1988 : Alicante, Spain)
Title
Plasma-surface interactions and processing of materials / edited by Orlando Auciello ... [et al.]
Imprint
Dordrecht ; Boston : Kluwer Academic Publishers, c1990.
Series
NATO ASI series. Series E, Applied sciences ; vol. 176
NATO ASI series. Series E, Applied sciences ; no. 176.
Bibliography
Includes bibliographical references and index.
Added Author
Auciello, Orlando.
Research Call Number
JSE 90-902
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