Research Catalog
Particle control for semiconductor manufacturing
- Title
- Particle control for semiconductor manufacturing / R.P. Donovan.
- Author
- Donovan, R. P.
- Publication
- New York : M. Dekker, c1990.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 91-137 | Offsite |
Details
- Description
- xiii, 464 p. : ill.; 26 cm.
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- Call Number
- JSF 91-137
- ISBN
- 0824782429 (alk. paper)
- LCCN
- 89049025
- OCLC
- 20800515
- NYPG90-B27166
- Author
- Donovan, R. P.
- Title
- Particle control for semiconductor manufacturing / R.P. Donovan.
- Imprint
- New York : M. Dekker, c1990.
- Bibliography
- Includes bibliographical references and index.
- Research Call Number
- JSF 91-137