Research Catalog

Rapid thermal annealing/chemical vapor deposition and integrated processing

Title: Rapid thermal annealing/chemical vapor deposition and integrated processing / symposium held April 25-28, 1989, San Diego, California, U.S.A. / editors, David Hodul ... [et al.].
Publication: Pittsburgh, Pa. : Materials Research Society, c1989.

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Description

xi, 494 p. : ill.; 24 cm.

Series Statement

Materials Research Society symposium proceedings, 0272-9172 ; v. 146

Uniform Title

Materials Research Society symposia proceedings ; v. 146.

Subjects

Note

Includes index.
Symposium held during the 1989 MRS Spring Meeting.

Bibliography (note)

Includes bibliographical references.

Call Number

JSE 91-498

ISBN

1558990194

LCCN

89039134

OCLC

20295997
20295997

Title

Rapid thermal annealing/chemical vapor deposition and integrated processing / symposium held April 25-28, 1989, San Diego, California, U.S.A. / editors, David Hodul ... [et al.].

Imprint

Pittsburgh, Pa. : Materials Research Society, c1989.

Series

Materials Research Society symposium proceedings, 0272-9172 ; v. 146

Materials Research Society symposia proceedings ; v. 146.

Bibliography

Includes bibliographical references.

Added Author

Hodul, David.

Materials Research Society. Meeting (1989 : San Diego, Calif.)

Research Call Number

JSE 91-498

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