Research Catalog

Handbook of semiconductor silicon technology

Title
Handbook of semiconductor silicon technology / edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.
Publication
Park Ridge, N.J., U.S.A. : Noyes Publications, c1990.

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StatusFormatAccessCall NumberItem Location
Book/TextRequest in advance JSE 91-1627Offsite

Details

Additional Authors
  • O'Mara, William C.
  • Herring, Robert B.
  • Hunt, Lee Philip.
Description
xx, 795 p. : ill.; 25 cm.
Series Statement
Materials science and process technology series
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 91-1627
ISBN
0815512376
LCCN
89077167
OCLC
  • 20825221
  • NYPG91-B72579
Title
Handbook of semiconductor silicon technology / edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.
Imprint
Park Ridge, N.J., U.S.A. : Noyes Publications, c1990.
Series
Materials science and process technology series
Bibliography
Includes bibliographical references and index.
Added Author
O'Mara, William C.
Herring, Robert B.
Hunt, Lee Philip.
Research Call Number
JSE 91-1627
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