Research Catalog

Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

Title
Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Theodore M. Besmann, Bernard M. Gallois.
Publication
Pittsburgh, Pa. : Materials Research Society, c1990.

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Details

Additional Authors
  • Besmann, Theodore M.
  • Gallois, Bernard M.
  • Symposium on the Chemical Vapor Deposition of Refractory Metals and Ceramics (1989 : Boston, Mass.)
Description
xiii, 399 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings, 02729172 ; v. 168
Uniform Title
Materials Research Society symposia proceedings ; v. 168.
Subjects
Bibliography (note)
  • Includes bibliographical references and indexes.
Call Number
JSE 91-2131
ISBN
1558990569
LCCN
90031687
OCLC
  • 21116773
  • NYPG91-B83484
Title
Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Theodore M. Besmann, Bernard M. Gallois.
Imprint
Pittsburgh, Pa. : Materials Research Society, c1990.
Series
Materials Research Society symposium proceedings, 02729172 ; v. 168
Materials Research Society symposia proceedings ; v. 168.
Bibliography
Includes bibliographical references and indexes.
Added Author
Besmann, Theodore M.
Gallois, Bernard M.
Symposium on the Chemical Vapor Deposition of Refractory Metals and Ceramics (1989 : Boston, Mass.)
Research Call Number
JSE 91-2131
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