Research Catalog

Tungsten and other advanced metals for VLSI/ULSI applications : proceedings of the ... Workshop.

Title
Tungsten and other advanced metals for VLSI/ULSI applications : proceedings of the ... Workshop.
Author
Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications.
Publication
Pittsburgh, Pa. : Materials Research Society, c1990-

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2 Items

StatusVol/DateFormatAccessCall NumberItem Location
no. 5TextRequest in advance JSP 92-111 Library has: 5 (1989), 7(1990). no. 5Offsite
1990TextRequest in advance JSP 92-111 Library has: 5 (1989), 7(1990). 1990Offsite

Details

Additional Authors
Materials Research Society.
Publication Date
5 (1989)-
Description
v. : ill.; 24 cm.
Alternative Title
  • Tungsten other adv. metals VLSI/ULSI appl.
  • Tungsten and other advanced metals for VLSI/ULSI applications
Subject
  • Integrated circuits > Very large scale integration > Materials > Congresses
  • Tungsten > Congresses
  • Heat resistant alloys > Congresses
Note
  • Title from caption.
Call Number
JSP 92-111
ISSN
1048-0854
LCCN
90641076
OCLC
NYPG92-S2988
Conference
Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications.
Title
Tungsten and other advanced metals for VLSI/ULSI applications : proceedings of the ... Workshop.
Imprint
Pittsburgh, Pa. : Materials Research Society, c1990-
Current Frequency
Annual
Added Author
Materials Research Society.
Abbreviated Title
Tungsten other adv. metals VLSI/ULSI appl.
Continues
m2as Workshop on Tungsten and Other Refractory Metals for VLSI Applications. Tungsten and other refractory metals for VLSI applications
Research Call Number
JSP 92-111 Library has: 5 (1989), 7(1990).
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