Research Catalog
Dry etching for VLSI
- Title
- Dry etching for VLSI / A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader.
- Author
- Roosmalen, A. J. van.
- Publication
- New York : Plenum Press, c1991.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 92-422 | Offsite |
Details
- Additional Authors
- Description
- xvii, 237 p. : ill.; 26 cm.
- Series Statement
- Updates in applied physics and electrical technology
- Subject
- Bibliography (note)
- Includes bibliographical references (p. 157-175) and index.
- Call Number
- JSF 92-422
- ISBN
- 0306438356
- LCCN
- 91007385
- OCLC
- 23142645
- NYPG91-B27355
- Author
- Roosmalen, A. J. van.
- Title
- Dry etching for VLSI / A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader.
- Imprint
- New York : Plenum Press, c1991.
- Series
- Updates in applied physics and electrical technology
- Bibliography
- Includes bibliographical references (p. 157-175) and index.
- Added Author
- Baggerman, J. A. G.Brader, S. J. H.
- Research Call Number
- JSF 92-422