Research Catalog
Film deposition by plasma techniques
- Title
- Film deposition by plasma techniques / Mitsuharu Konuma.
- Author
- Konuma, Mitsuharu, 1950-
- Publication
- Berlin ; New York : Springer-Verlag, c1992.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 92-1216 | Offsite |
Details
- Description
- ix, 224 p. : ill.; 24 cm.
- Series Statement
- Springer series on atoms + plasmas ; 10
- Subjects
- Note
- Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref.
- Bibliography (note)
- Includes bibliographical references (p. 216-220) and index.
- Call Number
- JSE 92-1216
- ISBN
- 3540540571 (Berlin : acid-free paper)
- 0387540571 (New York : acid-free paper)
- 3540525947
- 0387525947 (U.S.)
- LCCN
- 91037381
- OCLC
- 24667826
- NYPG92-B57301
- Author
- Konuma, Mitsuharu, 1950-
- Title
- Film deposition by plasma techniques / Mitsuharu Konuma.
- Imprint
- Berlin ; New York : Springer-Verlag, c1992.
- Series
- Springer series on atoms + plasmas ; 10
- Bibliography
- Includes bibliographical references (p. 216-220) and index.
- Added Author
- Konuma, Mitsuharu, 1950- Purazuma to seimaku no kiso.
- Research Call Number
- JSE 92-1216