Research Catalog

Atomic layer growth and processing : symposium held April 29 - May 1, Anaheim, California, U.S.A.

Title: Atomic layer growth and processing : symposium held April 29 - May 1, Anaheim, California, U.S.A. / editors, T.F. Kuech, P.D. Dapkus, Y. Aoyagi.
Publication: Pittsburgh : Materials Research Society, c1991.

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Additional Authors

Description

xiii, 360 p. : ill.; 24 cm.

Series Statement

Materials Research Society symposium proceedings ; v. 222

Uniform Title

Materials Research Society symposia proceedings ; v. 222.

Subject

Bibliography (note)

Call Number

JSE 92-1916

ISBN

1558991166

LCCN

91026832

OCLC

Title

Atomic layer growth and processing : symposium held April 29 - May 1, Anaheim, California, U.S.A. / editors, T.F. Kuech, P.D. Dapkus, Y. Aoyagi.

Imprint

Pittsburgh : Materials Research Society, c1991.

Series

Materials Research Society symposium proceedings ; v. 222

Materials Research Society symposia proceedings ; v. 222.

Bibliography

Includes bibliographical references and indexes.

Added Author

Kuech, T. F.

Dapkus, P. D.

Aoyagi, Y.

Research Call Number

JSE 92-1916