Research Catalog

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

Title
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg.
Publication
Pittsburgh, Pa. : Materials Research Society, c1990.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance JSE 92-1909Offsite

Details

Additional Authors
  • Bernhardt, Anthony.
  • Black, Jerry G.
  • Rosenberg, R.
Description
xi, 496 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 158
Uniform Title
Materials Research Society symposia proceedings ; v. 158.
Subjects
Bibliography (note)
  • Includes bibliographical references and indexes.
Call Number
JSE 92-1909
ISBN
1558990461
LCCN
90034801
OCLC
  • 21334618
  • NYPG93-B3528
Title
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg.
Imprint
Pittsburgh, Pa. : Materials Research Society, c1990.
Series
Materials Research Society symposium proceedings ; v. 158
Materials Research Society symposia proceedings ; v. 158.
Bibliography
Includes bibliographical references and indexes.
Added Author
Bernhardt, Anthony.
Black, Jerry G.
Rosenberg, R.
Research Call Number
JSE 92-1909
View in Legacy Catalog