Research Catalog

Characterization of plasma-enhanced CVD processes : symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A.

Title: Characterization of plasma-enhanced CVD processes : symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.
Publication: Pittsburgh, Pa. : Materials Research Society, c1990.

Items in the Library & Off-site

Filter by

1 Item

Item details
Status	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	Text	Request in advance	JSE 92-1919	Offsite

Details

Additional Authors

Description

ix, 250 p. : ill.; 24 cm.

Series Statement

Materials Research Society symposium proceedings ; v. 165

Uniform Title

Materials Research Society symposia proceedings ; v. 165.

Subjects

Bibliography (note)

Includes bibliographical references and indexes.

Call Number

JSE 92-1919

ISBN

1558990534

LCCN

90006543

OCLC

21974391
NYPG93-B3563

Title

Characterization of plasma-enhanced CVD processes : symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.

Imprint

Pittsburgh, Pa. : Materials Research Society, c1990.

Series

Materials Research Society symposium proceedings ; v. 165

Materials Research Society symposia proceedings ; v. 165.

Bibliography

Includes bibliographical references and indexes.

Added Author

Lucovsky, G.

Ibbotson, Dale E.

Hess, Dennis W.

Research Call Number

JSE 92-1919

View in Legacy Catalog