Research Catalog
The physics of submicron lithography
- Title
- The physics of submicron lithography / Kamil A. Valiev.
- Author
- Valiev, K. A. (Kamilʹ Akhmetovich)
- Publication
- New York : Plenum Press, c1992.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 92-934 | Offsite |
Details
- Description
- xi, 493 p. : ill.; 26 cm.
- Series Statement
- Microdevices
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- Call Number
- JSF 92-934
- ISBN
- 0306435780
- LCCN
- 91041122
- OCLC
- 24845420
- NYPG92-B30949
- Author
- Valiev, K. A. (Kamilʹ Akhmetovich)
- Title
- The physics of submicron lithography / Kamil A. Valiev.
- Imprint
- New York : Plenum Press, c1992.
- Series
- Microdevices
- Bibliography
- Includes bibliographical references and index.
- Research Call Number
- JSF 92-934