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Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

Title: Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices / edited by Orlando Auciello and Jürgen.
Publication: Dordrecht ; Boston : Kluwer Academic, c1993.

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Details

Additional Authors

Description

xv, 633 p. : ill.; 25 cm.

Series Statement

NATO ASI series. Series E, Applied sciences ; vol. 234

Uniform Title

NATO ASI series. Series E, Applied sciences ; no. 234.

Subject

Note

"Published in cooperation with NATO Scientific Affairs Division."
"Proceeding of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies Bad Windsheim, Germany September 21-October 2, 1992"--T.p. verso.

Bibliography (note)

Includes bibliographical references and index.

Call Number

JSE 93-1716

ISBN

0792322657 (acid-free paper)

LCCN

93020488 //r93

OCLC

27812402
NYPG93-B72008

Title

Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices / edited by Orlando Auciello and Jürgen.

Imprint

Dordrecht ; Boston : Kluwer Academic, c1993.

Series

NATO ASI series. Series E, Applied sciences ; vol. 234

NATO ASI series. Series E, Applied sciences ; no. 234.

Bibliography

Includes bibliographical references and index.

Added Author

Auciello, Orlando, 1945-

Engemann, Jürgen.

North Atlantic Treaty Organization. Scientific Affairs Division.

NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies (1992 : Bad Windsheim, Germany)

Research Call Number

JSE 93-1716

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