Research Catalog
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 192, San Francisco, California, U.S.A.
- Title
- Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 192, San Francisco, California, U.S.A. / editors, Robert J. Nemanich ... [et. al.].
- Publication
- Pittsburgh, Pa. : Materials Research Society, c1992.
Items in the Library & Off-site
Filter by
1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 93-1817 | Offsite |
Details
- Additional Authors
- Nemanich, R. J. (Robert J.)
- Description
- xiii, 529 p. : ill.; 24 cm.
- Series Statement
- Materials Research Society symposium proceedings ; v. 259
- Uniform Title
- Materials Research Society symposia proceedings ; v. 259.
- Subjects
- Bibliography (note)
- Includes bibliographical references and indexes.
- Call Number
- JSE 93-1817
- ISBN
- 1558991549
- LCCN
- 92026767
- OCLC
- 26403313
- NYPG93-B72025
- Title
- Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 192, San Francisco, California, U.S.A. / editors, Robert J. Nemanich ... [et. al.].
- Imprint
- Pittsburgh, Pa. : Materials Research Society, c1992.
- Series
- Materials Research Society symposium proceedings ; v. 259Materials Research Society symposia proceedings ; v. 259.
- Bibliography
- Includes bibliographical references and indexes.
- Added Author
- Nemanich, R. J. (Robert J.)
- Research Call Number
- JSE 93-1817