Research Catalog

IEEE/SEMI International Semiconductor Manufacturing Science Symposium : [proceedings].

Title: IEEE/SEMI International Semiconductor Manufacturing Science Symposium : [proceedings].
Publication: New York, NY : Institute of Electrical and Electronics Engineers, 1989-1993.

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Item details
Status	Vol/Date	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	1993	Text	Request in advance	JSM 93-7 1993	Offsite
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	1992	Text	Request in advance	JSM 93-7 1992	Offsite

Publication Date

1989-1993.

Description

5 v. : ill.; 28 cm.

Alternative Title

IEEE SEMI International Semiconductor Manufacturing Science Symposium
Proceedings, International Semiconductor Manufacturing Science Symposium, <1992>-1993

Subject

Call Number

JSM 93-7

LCCN

sn 92037368

OCLC

Title

IEEE/SEMI International Semiconductor Manufacturing Science Symposium : [proceedings].

Imprint

New York, NY : Institute of Electrical and Electronics Engineers, 1989-1993.

Current Frequency

Annual

Other Title

Proceedings, International Semiconductor Manufacturing Science Symposium, <1992>-1993

Continued By

International Symposium on Semiconductor Manufacturing. Proceedings

Research Call Number

JSM 93-7 Library has: 1992-1993.