Research Catalog

Rapid thermal processing : science and technology

Title
Rapid thermal processing : science and technology / edited by Richard B. Fair.
Author
Fair, Richard B.
Publication
Boston : Academic Press, c1993.

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TextRequest in advance JSE 94-186Offsite

Details

Description
viii, 430 p. : ill.; 24 cm.
Subject
  • Semiconductors > Heat treatment
  • Semiconductor doping
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 94-186
ISBN
0122476905
LCCN
93006882
OCLC
  • 27432101
  • NYPG93-B25257
Author
Fair, Richard B.
Title
Rapid thermal processing : science and technology / edited by Richard B. Fair.
Imprint
Boston : Academic Press, c1993.
Bibliography
Includes bibliographical references and index.
Research Call Number
JSE 94-186
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