Research Catalog
Handbook of semiconductor wafer cleaning technology : science, technology, and applications
- Title
- Handbook of semiconductor wafer cleaning technology : science, technology, and applications / edited by Werner Kern.
- Publication
- Park Ridge, N.J., U.S.A. : Noyes Publications, c1993.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSE 94-776 | Offsite |
Details
- Additional Authors
- Kern, Werner, 1925-
- Description
- xx, 623 p. : ill.; 25 cm.
- Series Statement
- Materials science and process technology series.
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- Call Number
- JSE 94-776
- ISBN
- 0815513313
- LCCN
- 93004078
- OCLC
- 27976222
- NYPGR27976222-B
- Title
- Handbook of semiconductor wafer cleaning technology : science, technology, and applications / edited by Werner Kern.
- Imprint
- Park Ridge, N.J., U.S.A. : Noyes Publications, c1993.
- Series
- Materials science and process technology series. Electronic materials and process technology
- Bibliography
- Includes bibliographical references and index.
- Added Author
- Kern, Werner, 1925-
- Research Call Number
- JSE 94-776