Research Catalog
Plasma properties, deposition and etching
- Title
- Plasma properties, deposition and etching / editors, J.J. Pouch and S.A. Alterovitz.
- Publication
- Aedermannsdorf, Switzerland ; Brookfield, VT : Trans Tech Publications, 1993.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 94-321 | Offsite |
Details
- Additional Authors
- Description
- x, 742 p. : ill.; 25 cm.
- Series Statement
- Materials science forum, 0255-5476 ; v. 140-142
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- Call Number
- JSF 94-321
- ISBN
- 087849670X (pbk.)
- OCLC
- 29916185
- NYPGR29916185-B
- Title
- Plasma properties, deposition and etching / editors, J.J. Pouch and S.A. Alterovitz.
- Imprint
- Aedermannsdorf, Switzerland ; Brookfield, VT : Trans Tech Publications, 1993.
- Series
- Materials science forum, 0255-5476 ; v. 140-142
- Bibliography
- Includes bibliographical references and index.
- Added Author
- Pouch, John J.Alterovitz, Samuel A.
- Research Call Number
- JSF 94-321