Research Catalog

The Chemistry of metal CVD

Title
The Chemistry of metal CVD / edited by Toivo T. Kodas and Mark J. Hampden-Smith.
Publication
Weinheim ; New York : VCH, c1994.

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Details

Additional Authors
  • Kodas, Toivo T. (Toivo Tarmo), 1958-
  • Hampden-Smith, Mark J.
Description
xxiv, 530 p. : ill.; 25 cm.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
Call Number
JSE 95-1615
ISBN
  • 1560818131
  • 3527290710
LCCN
94022847
OCLC
30893172
Title
The Chemistry of metal CVD / edited by Toivo T. Kodas and Mark J. Hampden-Smith.
Imprint
Weinheim ; New York : VCH, c1994.
Bibliography
Includes bibliographical references and index.
Added Author
Kodas, Toivo T. (Toivo Tarmo), 1958-
Hampden-Smith, Mark J.
Research Call Number
JSE 95-1615
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