Research Catalog

Principles of plasma discharges and materials processing

Title
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg.
Author
Lieberman, M. A. (Michael A.)
Publication
New York : Wiley, c1994.

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Details

Additional Authors
Lichtenberg, Allan J.
Description
xxvi, 572 p. : ill.; 25 cm.
Subjects
Note
  • "A Wiley-Interscience publication."
Bibliography (note)
  • Includes bibliographical references (p. 559-564) and index.
Call Number
JSE 95-1369
ISBN
0471005770
LCCN
94028954
OCLC
30896011
Author
Lieberman, M. A. (Michael A.)
Title
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg.
Imprint
New York : Wiley, c1994.
Bibliography
Includes bibliographical references (p. 559-564) and index.
Added Author
Lichtenberg, Allan J.
Research Call Number
JSE 95-1369
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