Research Catalog

Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies

Title: Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies / edited by M. Gentili, C. Giovannella, and S. Selci.
Author: NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies" (1993 : Frascati, Italy)
Publication: Dordrecht ; Boston : Kluwer Academic Publishers, 1994.

Filter by

Item details
Status	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	Text	Request in advance	JSE 94-1357	Offsite

Additional Authors

Description

xii, 215 p. : ill.; 25 cm.

Series Statement

NATO ASI series. no. 264

Subject

Note

"Proceedings of the NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies", Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso.
"Published in cooperation with NATO Scientific Affairs Division."

Bibliography (note)

Call Number

JSE 94-1357

ISBN

0792327942 (acid-free paper)

LCCN

94010205

OCLC

Conference

NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies" (1993 : Frascati, Italy)

Title

Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies / edited by M. Gentili, C. Giovannella, and S. Selci.

Imprint

Dordrecht ; Boston : Kluwer Academic Publishers, 1994.

Series

NATO ASI series. Series E. Applied sciences ; no. 264

Bibliography

Includes bibliographical references and indexes.

Added Author

Gentili, M.

Giovannella, Carlo.

Selci, S.

Research Call Number

JSE 94-1357