Research Catalog

Ion implantation : basics to device fabrication

Title: Ion implantation : basics to device fabrication / by Emanuele Rimini.
Author: Rimini, E.
Publication: Boston : Kluwer Academic Publishers, c1995.

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Description

xii, 393 p. : ill.; 25 cm.

Series Statement

The Kluwer international series in engineering and computer science ; SECS 293. Electronic materials, science and technology

Uniform Title

Kluwer international series in engineering and computer science ; SECS 293.
Kluwer international series in engineering and computer science. Electronic materials, science and technology.

Subjects

Bibliography (note)

Call Number

JSE 95-165

ISBN

0792395204 (acid-free paper)

LCCN

94034251 //r94

OCLC

31171598

Author

Rimini, E.

Title

Ion implantation : basics to device fabrication / by Emanuele Rimini.

Imprint

Boston : Kluwer Academic Publishers, c1995.

Series

The Kluwer international series in engineering and computer science ; SECS 293. Electronic materials, science and technology

Kluwer international series in engineering and computer science ; SECS 293.

Kluwer international series in engineering and computer science. Electronic materials, science and technology.

Bibliography

Includes bibliographical references (p. [359]-378) and index.

Research Call Number

JSE 95-165