Research Catalog

Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.

Title: Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A. / editors, George K. Celler, Juan R. Maldonado.
Publication: Pittsburgh, Pa. : Materials Research Society, 1993.

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Details

Additional Authors

Description

xi, 291 p. : ill.; 24 cm.

Series Statement

Materials Research Society symposium proceedings, 0272-9172 ; v. 306

Uniform Title

Materials Research Society symposia proceedings ; v. 306.

Subject

X-ray lithography > Congresses

Note

Papers based on the symposium on Materials Aspects of X-Ray Lithography, held in San Francisco, California, on April 12-14, 1993.

Bibliography (note)

Includes bibliographical references and indexes.

Call Number

JSE 94-1663

ISBN

1558992022

LCCN

93034352

OCLC

28799746
NYPGR28799746-B

Title

Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A. / editors, George K. Celler, Juan R. Maldonado.

Imprint

Pittsburgh, Pa. : Materials Research Society, 1993.

Series

Materials Research Society symposium proceedings, 0272-9172 ; v. 306

Materials Research Society symposia proceedings ; v. 306.

Bibliography

Includes bibliographical references and indexes.

Added Author

Celler, George K.

Maldonado, Juan R.

Materials Research Society.

Research Call Number

JSE 94-1663

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