Research Catalog

The physics of micro/nano-fabrication

Title
The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray.
Author
Brodie, Ivor.
Publication
New York : Plenum Press, c1992.

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Details

Additional Authors
Muray, Julius J.
Description
xix, 650 p. : ill.; 26 cm.
Series Statement
Microdevices
Subject
  • Microelectronics
  • Thin-film circuits
Bibliography (note)
  • Includes bibliographical references and indexes.
Call Number
JSF 95-42
ISBN
0306441462
LCCN
92028941
OCLC
  • 26398446
  • NYPG93-B13323
Author
Brodie, Ivor.
Title
The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray.
Imprint
New York : Plenum Press, c1992.
Series
Microdevices
Bibliography
Includes bibliographical references and indexes.
Added Author
Muray, Julius J.
Research Call Number
JSF 95-42
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