Research Catalog

Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

Title
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. / editors, C.R. Abernathy ... [et al.].
Publication
Pittsburgh, Pa. : Materials Research Society, c1993.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
TextRequest in advance JSE 95-544Offsite

Details

Additional Authors
Abernathy, C. R.
Description
xv, 727 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 282
Uniform Title
Materials Research Society symposia proceedings ; v. 282.
Subject
  • Microelectronics > Materials > Congresses
  • Semiconductors > Congresses
  • Surface chemistry > Congresses
Bibliography (note)
  • Includes bibliographical references and indexes.
Call Number
JSE 95-544
ISBN
1558991778
LCCN
93020201
OCLC
27432407
Title
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. / editors, C.R. Abernathy ... [et al.].
Imprint
Pittsburgh, Pa. : Materials Research Society, c1993.
Series
Materials Research Society symposium proceedings ; v. 282
Materials Research Society symposia proceedings ; v. 282.
Bibliography
Includes bibliographical references and indexes.
Added Author
Abernathy, C. R.
Research Call Number
JSE 95-544
View in Legacy Catalog