Research Catalog
Patterning of material layers in submicron region
- Title
- Patterning of material layers in submicron region / U.S. Tandon, W.S. Khokle.
- Author
- Tandon, U. S., 1952-
- Publication
- New York : J. Wiley, 1993.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 95-175 | Offsite |
Details
- Additional Authors
- Khokle, W. S.
- Description
- xii, 183 p. : ill. (some col.); 25 cm.
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- Call Number
- JSF 95-175
- ISBN
- 0470220635 (J. Wiley)
- 8122405614 (Wiley Eastern)
- LCCN
- 92036072
- OCLC
- 27036323
- Author
- Tandon, U. S., 1952-
- Title
- Patterning of material layers in submicron region / U.S. Tandon, W.S. Khokle.
- Imprint
- New York : J. Wiley, 1993.
- Bibliography
- Includes bibliographical references and index.
- Added Author
- Khokle, W. S.
- Research Call Number
- JSF 95-175