Research Catalog
High vacuum production in the microelectronics industry
- Title
- High vacuum production in the microelectronics industry / Pierre Duval.
- Author
- Duval, Pierre.
- Publication
- Amsterdam ; New York : Elsevier, 1988.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | JSF 96-576 | Offsite |
Details
- Additional Authors
- Alcatel Vacuum Technology (Firm)
- Description
- xiii, 222 p. : ill.; 25 cm.
- Series Statement
- Plasma technology ; 2
- Subjects
- Note
- "ALCATEL."
- Includes index.
- Bibliography (note)
- Bibliography: p. 163-167.
- Call Number
- JSF 96-576
- ISBN
- 044442878X
- LCCN
- 89116745
- OCLC
- 20391196
- NYPG88-B48557
- Author
- Duval, Pierre.
- Title
- High vacuum production in the microelectronics industry / Pierre Duval.
- Imprint
- Amsterdam ; New York : Elsevier, 1988.
- Series
- Plasma technology ; 2
- Bibliography
- Bibliography: p. 163-167.
- Added Author
- Alcatel Vacuum Technology (Firm)
- Research Call Number
- JSF 96-576