Research Catalog

Metallization : theory and practice for VLSI and ULSI

Title: Metallization : theory and practice for VLSI and ULSI / Shyam P. Murarka.
Author: Murarka, S. P.
Publication: Boston Butterworth-Heinemann, c1993.

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Description

vi, 250 p. : ill.; 26 cm.

Subjects

Bibliography (note)

Call Number

JSF 96-269

ISBN

0750690011 (acid-free paper)

LCCN

92033603

OCLC

26673488

Author

Murarka, S. P.

Title

Metallization : theory and practice for VLSI and ULSI / Shyam P. Murarka.

Imprint

Boston Butterworth-Heinemann, c1993.

Bibliography

Includes bibliographical references and index.

Indexed Term

Integrated circuits

Research Call Number

JSF 96-269